| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus and a method for calculating electric charges in respective layers constituting a layer structure by means of a simulation process. SOLUTION: Configuration information for the layer structure to be analyzed is inputted as a parameter, and the electric charges in respective layers are calculated on the basis of the parameter. A electric charge calculating process for every layer is executed on the basis of a differential equation with respect to the electric charge densityσ<SB>i,i+1</SB>of a boundary between successive layer<SB>i</SB>and layer<SB>i</SB>+1 and a relational expression of respective surface electric charge densities. Furthermore, electric charge transitions in respective layer with time transition are calculated including layer thickness information d(t) which is varied with time (t). COPYRIGHT: (C)2007,JPO&INPIT
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