| 摘要 |
PROBLEM TO BE SOLVED: To solve the point at issue that it is difficult to inspect a large number of inspection targets at a high speed. SOLUTION: In inspecting the inspection target by X rays, X rays are emitted to a predetermined solid angle range, a large number of the inspection targets arranged in a planar state are moved within an X-ray output range in a planar state and X-ray images are acquired by a detector having a detection surface, which is inclined with respect to the axis vertical to the moving plane, at a plurality of rotary positions being the positions contained in the solid angle rage and centering around the axis vertical to the moving plane while altering the positions of the inspection targets due to the planar moving process. The transmission images of the inspection targets are extracted from the X-ray images at a plurality of the rotary positions and the reconstitution operation of the inspection targets is executed on the basis of the extracted transmission images to inspect the inspection targets. COPYRIGHT: (C)2007,JPO&INPIT
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