| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem that washing liquid jetted from a nozzle does not easily infiltrate in a gap between contaminants and an object to be washed since it contains large particles and it is very difficult to peel off stuck contaminants in a conventional washing device. SOLUTION: A flowing water type ultrasonic atomizer 7 is mounted on the upper part of a housing 6, an ultrasonic transducer 8 is mounted on the upper part of the flowing water type ultrasonic atomizer 7, and a nozzle 7a is formed on a lower surface facing the ultrasonic transducer 8. Liquid 10 is supplied from a liquid supplier 9 to the flowing water type ultrasonic atomizer 7 so as to be filled in the ultrasonic transducer 8, oscillation output is impressed from an oscillator 11 to the ultrasonic transducer 8, and a gas supplier 12 provided with a gas supply port 12a is connected to the side face of the housing 6. A discharge port 13 for discharging the gas is formed at the upper part of the housing 6 at a position facing the gas supply port 12a, a blow-off pipe 15 is formed at the discharge port 13, and a work 16 is mounted or movably mounted facing the blow-off port 15a of the blow-off pipe 15. COPYRIGHT: (C)2007,JPO&INPIT
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