发明名称 |
Method and system for forming an oxynitride layer by performing oxidation and nitridation concurrently |
摘要 |
A method for preparing an oxynitride film on a substrate comprising forming the oxynitride film by exposing a surface of the substrate to oxygen radicals and nitrogen radicals formed by plasma induced dissociation of a process gas comprising nitrogen and oxygen using plasma based on microwave irradiation via a plane antenna member having a plurality of slits.
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申请公布号 |
US2006228871(A1) |
申请公布日期 |
2006.10.12 |
申请号 |
US20050093262 |
申请日期 |
2005.03.30 |
申请人 |
WAJDA CORY S;SCHEER KRISTEN;FURAKAWA TOSHIHARA |
发明人 |
WAJDA CORY S.;SCHEER KRISTEN;FURAKAWA TOSHIHARA |
分类号 |
B01J19/08;H01L21/20 |
主分类号 |
B01J19/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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