摘要 |
A light wavefront measuring apparatus ( 2, 2 a , 42 ) includes a separating element ( 7 a , 47 a) for separating a flux of light which exits from an optical head ( 1, 31 ) into a first beam and a second beam, a first interference fringe display section ( 21, 21 a) for displaying interference fringes formed from the first beam, a Dove prism ( 13, 53 ) for rotating a wavefront of the second beam around its optical axis (AX<SUB>2</SUB>), and a second interference fringe display section ( 22, 22 a) for displaying interference fringes formed from the second beam which passed through it. In adjustment of the light source device, position of a collimator ( 5 ) in the optical head ( 1, 31 ) is adjusted in optical axis direction so as to approximate the interference fringe patterns displayed in the interference fringe display sections ( 21, 22, 21 a , 22 a) each other.
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