| 发明名称 |
Silicon inertial sensors formed using MEMS |
| 摘要 |
A MEMS silicon inertial sensor formed of a mass that is supported and constrained to vibrate in only specified ways. The sensors can be separately optimized from the support, to adjust the sensitivity separate from the bandwidth. The sensor can sense three dimensionally, or can only sense in a single plane. Vibration cancellation may be provided.
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| 申请公布号 |
US2006225506(A1) |
申请公布日期 |
2006.10.12 |
| 申请号 |
US20050241869 |
申请日期 |
2005.09.30 |
| 申请人 |
MADNI ASAD;ZOU QIANG;KIM EUN S;COSTLOW LYNN;VUONG JIM;WELLS ROGER |
发明人 |
MADNI ASAD;ZOU QIANG;KIM EUN S.;COSTLOW LYNN;VUONG JIM;WELLS ROGER |
| 分类号 |
G01P15/10;G01C19/56 |
主分类号 |
G01P15/10 |
| 代理机构 |
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