INTERLEAVED MEMS-BASED PROBES FOR TESTING INTEGRATED CIRCUITS

摘要

In one embodiment, a probe card includes a substrate and a plurality of probes (30). Each of the probes (30) may have a supported portion (31) and an unsupported portion (32) that meet at a base. The unsupported portion (32) may have a non-uniform (e.g. triangular) cross-section along a length that begins at the base. The probes may be interleaved and fabricated using MEMS fabrication techniques.