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发明名称
SYSTEM FOR CONTROLLING MAINTENANCE CYCLE OF SEMICONDUCTOR EQUIPMENT
摘要
申请公布号
KR20060106394(A)
申请公布日期
2006.10.12
申请号
KR20050029517
申请日期
2005.04.08
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
CHUNG, JAE WOO;JUNG, JUN;SEO, HAENG YONG;KANG, YOUNG HO
分类号
H01L21/02
主分类号
H01L21/02
代理机构
代理人
主权项
地址
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