PLASMA GENERATING ELECTRODE AND PLASMA REACTOR

摘要

PROBLEM TO BE SOLVED: To provide a plasma generating electrode in which the plasma of a high energy state can be generated with a low electric power.

SOLUTION: This is the plasma generating electrode 1 which is provided with at least a set of unit electrode 2 as an anode and unit electrode 3 as a cathode, and which can generate the plasma by applying an electric voltage. The unit electrode 2 as the anode and the unit electrode 3 as the cathode are arranged opposing to each other, wherein at least the unit electrode 2 as the anode has a plate-shaped ceramic dielectrics 5 and a conductive membrane 6 arranged inside the ceramic dielectrics 5, while at the same time the unit electrode 3 as the cathode is capable of emitting 5 times or more numbers of secondary electrons against those of cations it receives at the time of collision of the cations (primary particles) generated during the plasma generating process.

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