| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a measuring probe capable of condensing only the emission of plasma itself without receiving disturbance such as scattered light or the like even if the distance between the plasma electrodes of a plasma discharge processor is narrow or a discharge space has any shape. <P>SOLUTION: The measuring probe 1 is equipped with a photoconductive member 2 for transmitting light data for use in the measurment of the spectral intensity of the plasma P produced between the plasma electrodes E1 and E2 in the plasma discharge processor D, a condenser lens 3 for condensing the emission of the plasma P to the end surface of the photoconductive member 2 and the slit member 4 having a plurality of slits 6 arranged between the condensing lens 3 and the plasma electrodes E1 and E2. <P>COPYRIGHT: (C)2007,JPO&INPIT |
