| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a small-sized spectroscopic gas sensor which is formed on a silicon substrate, and has high sensitivity and excellent productivity. <P>SOLUTION: In the spectroscopic gas sensor having: an infrared light source for emitting infrared rays; a photodetector for converting luminous intensity to an electric signal; a filter for permitting a specific wavelength region to pass; and a light guide pipe for guiding the light of the spectroscopic gas sensor to the photodetector through the atmosphere containing a detection gas, the infrared light source is integrally molded on the silicon substrate to form a groove part to the silicon substrate by a photolithographic method and, after a metal reflecting film is bonded to the silicon substrate, the silicon substrate is joined to form the light guide pipe. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
