| 摘要 |
PROBLEM TO BE SOLVED: To perform positional control accurately by making electrostatic attraction and elastic force cooperate efficiently with each other thereby enabling specified high output to be taken out even from its initial state where electrostatic attraction is weak, and besides by varying the generation power of the sum of the electrostatic attraction and the elastic force thereby enabling the gap interval to balance external force to be set optionally. SOLUTION: This electrostatic actuator is equipped with a fixed electrode 14 which is set at a specified interval to a mobile electrode 12. Electrostatic attraction arises between the mobile electrode and the fixed electrode. It accumulates the work by the change of the interval between the mobile electrode and the fixed electrode as elastic force. An output part 18 is driven by the force of the elastic attraction and the elastic force. COPYRIGHT: (C)2007,JPO&INPIT |
