| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing process of nano sheets which comply with demands for industrial mass-production and low cost. SOLUTION: The manufacturing process comprises steps (a) to (e) as follows. (a) A substrate 11 and a die 13 are installed, at least a transparent part is formed in the substrate and/or the die, the die is located above the substrate, a nano pattern is set on the bottom face of the die, and a releasing agent 17 is put on the surface of the nano pattern, under a vacuum circumstance. (b) The substrate is coated with an imprint layer, and the imprint layer gets curable on ultraviolet ray irradiation. (c) The die is pressure welded to the substrate, and the imprint layer fills the gap between the nano pattern and the substrate. (d) The ultraviolet ray is emitted, permeated inside the die or the substrate and cleared to irradiate the imprint layer and cures the imprint layer. (e) The die 13 is detached and moved from the substrate, a film is separated, an imprint layer 19 is formed to a pattern corresponding to that of the nano pattern, and the nano sheet is formed. COPYRIGHT: (C)2007,JPO&INPIT |
