METHOD AND APPARATUS FOR MODIFYING SURFACE OF ARTICLE BY FLUORINE-CONTAINING GAS

摘要

PROBLEM TO BE SOLVED: To provide a method for safely modifying the surface of an article easily by F2gas in a simple apparatus. SOLUTION: F2gas having satisfactory concentration and quantity is generated efficiently from a fluorine-containing compound by exciting the fluorine-containing compound in a pressure-reduced state to produce active radicals, increasing the reduced pressure to atmospheric pressure or higher and cooling the produced active radicals to substantially deactivate all of the produced active radicals. The generated F2gas is used for modifying the surface of the article. COPYRIGHT: (C)2007,JPO&INPIT