| 摘要 |
PROBLEM TO BE SOLVED: To provide a fatigue testing device and method for a semiconductor device capable of making a fatigue condition near to that resulting from actual temperature fluctuation, by precluding deflection from increasing along with a testing time. SOLUTION: In this fatigue testing method of applying a load repeatingly onto a testing body 1 of the semiconductor, an elastic sheet 2 is arranged to bring a face of the elastic sheet 2 into contact with the testing body 1, and the load is applied onto a face of the testing body in an opposite side of the elastic sheet. COPYRIGHT: (C)2007,JPO&INPIT
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