| 摘要 |
PROBLEM TO BE SOLVED: To provide a plasma treatment method capable of suppressing damages on an object to be treated and improving washing ability. SOLUTION: The plasma treatment method for treating the object to be treated by discharge plasma under a pressure near an atmospheric pressure includes a process of introducing gas containing at least one of helium gas and argon gas between a first electrode and a second electrode arranged facing each other, a process of generating the discharge plasma by applying a high frequency voltage of a frequency≥1MHz and≤50MHz between the first electrode and the second electrode, and a process of treating the object to be treated by bringing the discharge plasma into contact with the object to be treated. COPYRIGHT: (C)2007,JPO&INPIT
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