发明名称 Cell region layout of semiconductor device and method of forming contact pad using the same
摘要 A cell region layout of a semiconductor device formed by adding active regions in the outermost portion of a cell region, and a method of forming a contact pad using the same are provided. The layout and the method include a first active region formed at the outermost portion of the cell region, and having the same shape as that of an inner active region located inwardly from the outermost portion of the cell region, and a third active region formed by adding at least two second active regions having shapes different from that of an inner active region. Further, an insulating layer fills a portion below a bit line passing the third active region. A lifting phenomenon occurring where an active region is not formed can be prevented by adding the active regions at the outermost portion of the cell region, and a bridge phenomenon occurring when bit lines or a bit line contact and a gate line electrically contact can be suppressed by filling a portion below a bit line with an insulating layer.
申请公布号 US2006226472(A1) 申请公布日期 2006.10.12
申请号 US20060395855 申请日期 2006.03.31
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 BAEK CHEOL-HO
分类号 H01L29/788;H01L21/336 主分类号 H01L29/788
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