MEMS FILTER MODULE WITH CONCENTRIC FILTERING WALLS

摘要

A bidirectional flow MEMS filter module (40) is disclosed that uses a plurality of concentrically disposed filtering walls (60). The MEMS filter module (40) includes a first plate (44) having a plurality of first flow ports (48), as well as a second plate (52) having a plurality of second flow ports (56) that is spaced from and interconnected with the first plate (44). The above-noted filtering walls (60) extend from the second plate (52) at least toward the first plate (44). The first plate (44) and each filtering wall (60) are spaced from each other to define a filter trap (64). All flow through the MEMS filter module (40) must pass through at least one filter trap (64) prior to exiting the MEMS filter module (40), either through one or more of the first flow ports (48) or through one or more of the second flow ports (56).