| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a thin fan filter unit of uniform distribution of wind speed of a filter. <P>SOLUTION: This fan filter unit comprises a box-shaped chamber 1, a suction opening 2 for sucking the air into the chamber 1 from the external, a fan 3, a motor 4 for rotating the fan 3 and a motor support 5 for fixing the motor 4, mounted in the chamber 1, a filter 6 placed at the downstream of the fan 3 and in adjacent to the chamber 1 for cleaning the air, and a guide plate 7 mounted on an outer peripheral portion of the fan 3. The more the air flows to the guide plate 7, the smaller a distance between the filter 6 and the guide plate 7 is made. <P>COPYRIGHT: (C)2007,JPO&INPIT |
