| 摘要 |
PROBLEM TO BE SOLVED: To provide a washing device that is excellent in productivity and economic efficiency, capable of removing an organic coating film like a resist or the like stuck to an object to be washed such as a spin coater cup, a semiconductor wafer, and a liquid crystal glass substrate in a short period of time, and also, capable of repeatedly using a washing fluid many times without replacing it. SOLUTION: A holding basket for holding the object to be washed is rotatably arranged in a washing chamber. A spraying nozzle is installed in the washing chamber toward the object to be washed. After washing the object to be washed with alkylene carbonate and rinsing it with purified water, the remaining liquid of the object to be washed is removed by jetting out hot air toward the object to be washed. The alkylene carbonate after washing the object to be washed is circulated and reused by decomposing an organic coating film component by ozone in a washing fluid regeneration device. COPYRIGHT: (C)2007,JPO&INPIT
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