| 摘要 |
PROBLEM TO BE SOLVED: To provide a laminator constituted so as to dispense with a special device or the like and capable of preventing air bubbles from remaining in a substrate after lamination by properly controlling air in a laminating space, and a lamination method. SOLUTION: The laminator for laminating a pair of substrates P1 and P2 coated with adhesive layers R2 is equipped with a vacuum chamber 5, a susceptor 6 on which one substrate P1 is placed and a holding part 4 for holding the other substrate P2 at a predetermined interval with respect to one substrate P1. The surface of the inner wall 5a of the vacuum chamber 5 is made porous, and a steam supply device for supplying steam V and an exhaust device for performing vacuum exhaustion are connected to the supply and discharge port 5b of the vacuum chamber 5. The substrates P1 and P2 having the adhesive layers R2 formed thereto are introduced into the vacuum chamber 5, of which the inner wall 5a has adsorbed steam V supplied from the steam supply device, and laminated by the holding part 4 after the steam V is discharged by evacuating the vacuum chamber 5 by the exhaust device. COPYRIGHT: (C)2007,JPO&INPIT
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