Micro-electromechanical valve having transformable valve actuator

摘要

A micro-electromechanical valve is provided having a channel defined by a substrate and circuitry thereon so as to terminate at an aperture, a closure member arranged to be displaceable between first and second positions at which the aperture is respectively covered and uncovered and fluid is respectively inhibited and permitted from flowing through the channel, and an elongate actuator for displacing the closure member between the first and second positions. One end of the actuator is anchored to the substrate and the other end is connected to the closure member. A portion of the actuator in electrical contact with the circuitry is configured to transform between straightened and arcuate shapes when respectively heated and cooled by respective receipt and withdrawal of electrical current from the circuitry. The actuator displaces the closure member between the first and second positions in response to the transformation of the portion.