发明名称 Method of making nitride-based compound semiconductor crystal and substrate
摘要 A method of making a nitride-based compound semiconductor crystal has the step of growing a nitride-based compound semiconductor crystal with a predetermined thickness by using a nitride-based compound semiconductor substrate as a seed crystal. The nitride-based compound semiconductor substrate as the seed crystal is polished at both surfaces thereof.
申请公布号 US2006228819(A1) 申请公布日期 2006.10.12
申请号 US20050179781 申请日期 2005.07.13
申请人 HITACHI CABLE, LTD. 发明人 OSHIMA YUICHI
分类号 H01L21/00 主分类号 H01L21/00
代理机构 代理人
主权项
地址