| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an exposure method capable of preventing deterioration in exposure accuracy, due to bubbles inside a liquid. <P>SOLUTION: This method has a first process of supplying a second liquid different in at least either of specific gravity and temperature from a first liquid into the first liquid in a second space K2, or a second process of discharging the second liquid from the second space K2. <P>COPYRIGHT: (C)2007,JPO&INPIT |
