发明名称 DUST REMOVING DEVICE AND DUST REMOVAL METHOD
摘要 PROBLEM TO BE SOLVED: To provide a dust removing device that can secure a sufficient amount of absorption even if the separation is reduced between a suction nozzle and a body to be treated, and can remove dust efficiently by inducing a vortex flow in the fresh air to be sucked. SOLUTION: The dust-removing apparatus A comprises the cylindrical suction nozzle 1; a sucking means for sucking the fresh air from the side of a tip 1b of the suction nozzle 1, while being connected to the rear end of the suction nozzle 1; and a holding stand that arranges the body 3 to be treated, so that it opposes the tip 1b of the suction nozzle 1 and holds the body 3 to be treated, thus removing dust adhering to the body 3 to be treated by sucking the fresh air by the suction nozzle 1 while the tip 1b is brought closer to the body 3 to be treated. In the dust-removing device A, a groove 5 connected from an outer surface 1c to an inner surface 1d in the suction nozzle 1 is provided at the tip 1b of the suction nozzle 1, and the groove 5 is formed so that a center line O1 of the groove 5 crosses the direction of the diameter of the tip 1b of the suction nozzle 1. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2006278367(A) 申请公布日期 2006.10.12
申请号 JP20050090493 申请日期 2005.03.28
申请人 YAMAHA CORP 发明人 HAMAZAKI SHINJI
分类号 H01L21/304;B08B5/04;H01L21/02 主分类号 H01L21/304
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