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发明名称
VORRICHTUNG UND VERFAHREN ZUR ENTFERNUNG VON FREMDKÖRPERN VON HALBLEITEROBERFLÄCHEN
摘要
申请公布号
DE60122768(D1)
申请公布日期
2006.10.12
申请号
DE20016022768
申请日期
2001.11.21
申请人
APPLIED MATERIALS INC.;UZIEL, YORAM;YOGEV, DAVID;POLES, EHUD;WACHS, AMIR
发明人
UZIEL, YORAM;YOGEV, DAVID;POLES, EHUD;WACHS, AMIR
分类号
B08B5/04;B08B7/00;H01L21/00;H01L21/304;H01L21/68
主分类号
B08B5/04
代理机构
代理人
主权项
地址
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