PARTIALLY ETCHED DIELECTRIC FILM WITH CONDUCTIVE FEATURES
摘要
Provided are partially etched dielectric films with raised conductive features. Also provided are methods for forming the raised conductive features in the dielectric films, which methods include partially etching the dielectric films.
申请公布号
EP1709848(A1)
申请公布日期
2006.10.11
申请号
EP20050705770
申请日期
2005.01.13
申请人
3M INNOVATIVE PROPERTIES COMPANY
发明人
BRUNNER, DENNIS M.;BUSTER, DAVID L.;GRAFF, MICHAEL S.;LUEBBERT, DANIEL K.;KREUTTER, NATHAN P.;YANG, RUI;MAO, GUOPING
