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发明名称
Method for Forming Salicide in Semiconductor Device
摘要
申请公布号
KR100633687(B1)
申请公布日期
2006.10.11
申请号
KR20040117851
申请日期
2004.12.31
申请人
发明人
分类号
H01L21/24;H01L21/312;H01L21/324;H01L21/336
主分类号
H01L21/24
代理机构
代理人
主权项
地址
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