发明名称
摘要 PROBLEM TO BE SOLVED: To provide a cargo storage facility in which the entire facility can be miniaturized at low cost, and clean air can be allowed to appropriately flow over the whole area. SOLUTION: A rotary shelf 21 is provided in an enclosure body 11 kept in a clean atmosphere by down-flow. The rotary shelf 21 is provided rotatably around the axis 22 of the rotary shelf in the longitudinal direction, and a cargo receiving part 32 group is provided on a rotary disk passage 23 around the axis 22 of the rotary shelf. An air-blowing means 131 for forming downward air flow is provided on a lower part of the rotary shelf 21. Since the inside of the enclosure body 11 is in clean atmosphere, dust generated from the rotary shelf 21, etc., can be rapidly removed on the clean air flow. Clean air can be allowed to appropriately flow over the entire area by forming downward air flow (in the down-flow direction) in the lower part of the rotary shelf 21 in which clean air flows slowly to easily form a stagnant state by the air-blowing means 131.
申请公布号 JP3832254(B2) 申请公布日期 2006.10.11
申请号 JP20010044388 申请日期 2001.02.21
申请人 发明人
分类号 B65G1/00;B65G1/04;B65G1/133;B65G49/00;F24F7/06;H01L21/677;H01L21/68 主分类号 B65G1/00
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