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发明名称
CATADIOPTRIC PROJECTION OBJECTIVE
摘要
申请公布号
EP1709472(A2)
申请公布日期
2006.10.11
申请号
EP20050700877
申请日期
2005.01.13
申请人
CARL ZEISS SMT AG
发明人
SHAFER, DAVID;ULRICH, WILHELM;DODOC, AURELIAN;VON BUENAU, RUDOLF;MANN, HANS-JUERGEN;EPPLE, ALEXANDER
分类号
G02B17/00;G02B17/08;G03F7/20
主分类号
G02B17/00
代理机构
代理人
主权项
地址
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