发明名称 PIEZOELECTRIC ELEMENT, LIQUID-JET HEAD AND LIQUID-JET APPARATUS
摘要 <p>Disclosed are a piezoelectric element (300) which can obtain a large strain with a low drive voltage, a liquid-jet head and a liquid-jet apparatus. The piezoelectric element includes: a lower electrode (60); an upper electrode (80); and a piezoelectric film (70) which is made of lead zirconate titanate (PZT), and which has perovskite crystals having priority orientations of the (100) plane, the piezoelectric film being interposed between the lower electrode and the upper electrode. In the piezoelectric element, an X-ray diffraction peak position derived from the (100) planes of the piezoelectric film is within a range of 2¸=21.79 to 21.88.</p>
申请公布号 KR20060105566(A) 申请公布日期 2006.10.11
申请号 KR20060028852 申请日期 2006.03.30
申请人 SEIKO EPSON CORPORATION 发明人 SUMI KOJI;KAZAMA HIRONOBU
分类号 H01L41/02;B41J2/045;B41J2/055;B41J2/135;B41J2/14;B41J2/145;H01L41/09;H01L41/18;H01L41/187;H01L41/29;H01L41/318;H01L41/319;H01L41/39 主分类号 H01L41/02
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