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发明名称
FLEXIBLE HOSE FOR USE OF COOLING SYSTEM OF SEMICONDUCTOR DEPOSITION EQUIPMENT
摘要
申请公布号
KR20060105816(A)
申请公布日期
2006.10.11
申请号
KR20050028242
申请日期
2005.04.04
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
HAM, KYU HWAN
分类号
H01L21/22
主分类号
H01L21/22
代理机构
代理人
主权项
地址
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