APPARATUS OF DEFECT INSPECTION IN SEMICONDUCTOR DEVICE AND METHOD OF USING THE SAME,申请号KR20050028296-传众专利搜索

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发明名称	APPARATUS OF DEFECT INSPECTION IN SEMICONDUCTOR DEVICE AND METHOD OF USING THE SAME
摘要
申请公布号	KR20060105856(A)	申请公布日期	2006.10.11
申请号	KR20050028296	申请日期	2005.04.04
申请人	HYNIX SEMICONDUCTOR INC.	发明人	JIE, SEOK HO
分类号	H01L21/66	主分类号	H01L21/66
代理机构		代理人
主权项
地址

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