| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To improve resolving power for pulse-height measurement using an energy distributed X-ray detector. <P>SOLUTION: In this electron beam analyzer, when one of X-ray is detected, EDX 5 generates an electrical pulse, and the pulse is amplified by an amplifier 6, and then its height is converted to a digital value by an A/D converter 7 and taken in a histogram memory 10. Since the height of the pulse generated by the EDX 5 is proportional to the energy of the detected X-ray, the digital output of the A/D converter 7 shows the energy of the X-ray, while the strength of the X-ray is measured by counting the number of the X-ray per unit time. Acceleration voltage data to an electron beam source 2 are also inputted to an amplification factor controller 8, and then the amplification factor controller 8 is set as an amplification factor of the amplifier 6, being inversely proportional to the acceleration voltage in order to make match the pulse with maximum energy to the maximum input voltage of the A/D converter 7. As a result, the dynamic range of the A/D converter 7 is used fully without wasting the dynamic range. <P>COPYRIGHT: (C)2003,JPO</p> |
