| 摘要 |
An alignment apparatus and a method of driving the same are provided to prevent a substrate from being damaged by supplying a pin by spacing the substrate from a table through a blower. An alignment apparatus includes a table(30), transfer members(20) positioned on four corners on the table, a blower(35) positioned under the table, alignment pins(50) vertically protruding from a surface of the table, and a vacuum pump(40) positioned under the table. The transfer member aligns a substrate(15) transferred onto the table. A blower spaces the substrate from the table when the substrate is carried in/out. The alignment pin is driven by a cylinder to align the substrate. |
