发明名称 |
Selective ionic implantation of fluoropolymer film to modify the sensitivity of underlying sensing capacitors |
摘要 |
A touch-sensitive semiconductor chip having a physical interface to the environment, where the surface of the physical interface is coated with a fluorocarbon polymer. The polymer is highly scratch resistant and has a characteristic low dielectric constant for providing a low attenuation to electric fields. The polymer can be used instead of conventional passivation layers, thereby allowing a thin, low dielectric constant layer between the object touching the physical interface, and the capacitive sensing circuits underlying the polymer. |
申请公布号 |
EP1321981(A3) |
申请公布日期 |
2006.10.11 |
申请号 |
EP20020257811 |
申请日期 |
2002.11.12 |
申请人 |
STMICROELECTRONICS, INC. |
发明人 |
SIEGEL, HARRY M.;LANE, FRED P.;EVANS, RICHARD P. |
分类号 |
G06K9/00;H01L23/29;G06K9/20;H01L23/31 |
主分类号 |
G06K9/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|