PLASMA PROCESSING APPARATUS

摘要

A plasma processing apparatus is provided to improve cooling efficiency by using a zigzag type connection structure between circulation lines. A plasma processing apparatus is used for generating predetermined plasma in a vacuum state chamber. The plasma processing apparatus includes a lower electrode and a cooling plate. The lower electrode is installed in a lower portion of the chamber. The lower electrode is used for loading a substrate. The cooling plate(140) is under the lower electrode, so that the cooling plate contacts a lower region of the lower electrode in order to cool the lower electrode. The cooling plate includes an inlet port, an outlet port, a plurality of circulation lines(142) parallel with each other, and a plurality of connection members for connecting the circulation lines with each other and forming the circulating line structure like a zigzag type structure.