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发明名称
PLASMA PROCESSING APPARATUS
摘要
申请公布号
KR20060105668(A)
申请公布日期
2006.10.11
申请号
KR20060029690
申请日期
2006.03.31
申请人
TOKYO ELECTRON LIMITED
发明人
HIMORI SHINJI;MATSUDO TATSUO
分类号
H01L21/3065
主分类号
H01L21/3065
代理机构
代理人
主权项
地址
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