| 发明名称 |
Method of fabricating a composite carbon nanotube thermal interface device |
| 摘要 |
A composite carbon nanotube structure including a number of carbon nanotubes disposed in a metal matrix. The composite carbon nanotube structure may be used as a thermal interface device in a packaged integrated circuit device.
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| 申请公布号 |
US7118941(B2) |
申请公布日期 |
2006.10.10 |
| 申请号 |
US20030607390 |
申请日期 |
2003.06.25 |
| 申请人 |
INTEL CORPORATION |
发明人 |
ZHANG YUEGANG;DUBIN VALERY M.;GARNER C. MICHAEL |
| 分类号 |
H01L21/48;H01L23/373 |
主分类号 |
H01L21/48 |
| 代理机构 |
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