| 摘要 |
High performance optical edge and laser-line filters and methods of making the same are disclosed. The optical edge filters have an edge steepness greater than about 0.8% as measured by dividing (a) the edge width from the 50% transmission wavelength to the optical density 6 ("OD6") wavelength by (b) the 50% transmission wavelength. The optical edge filters also have an average transmission above about 95%. The laser-line filters have an extremely high transmission in the passband (greater than 90%), an extremely narrow transmission bandwidth, and achieve blocking with an optical density (OD) greater than 5 at wavelengths that differ from the laser wavelength by less than 1% of the laser wavelength. The methods for making such filters accurately determine when deposition of each layer of the filter should terminate.
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