PRECURSORS OF NOVEL TITANIUM OXIDE AND PREPARATION METHOD THEREOF

摘要

An organo-titanium compound is provided to be thermally stable and high volatile, thereby being used for high quality titanium oxide film. The organo-titanium compound is represented by the formula(1) and prepared by reacting an amido compound of titanium represented by the formula(2), Ti(NR'_2)4, with an alcohol compound represented by the formula(3), HOCR^1R^2R^3, or by reacting titanium chloride represented by the formula(4), TiCl4, with an alkali metal salt of alcohol represented by the formula(5), M'OCR^1R^2R^3. In the formulae(1) to (5), each R^1, R^2 and R^3 is independently C1-4 linear or branched alkyl, provided that not all the R^1, R^2 and R^3 are methyl, R' is methyl or ethyl, and M' is Li, Na or K.