Method for electrostatically separating particles, apparatus for electrostatically separating particles, and processing system

摘要

An electrostatic separation apparatus for conductive particles and insulating particles with reduced separation time and improved separating capability, comprises a substantially flat-plate shaped bottom electrode ( 26 ) provided on lower side, a substantially flat-plate shaped mesh electrode ( 22 ) provided above the bottom electrode ( 26 ) as spaced a predetermined distance apart from the bottom electrode ( 26 ) and having a number of openings ( 24 ) to allow particles to pass therethrough, a direct current power supply connected to at least one of the mesh electrode ( 22 ) and the bottom electrode ( 24 ), and a voltage is applied across the bottom electrode ( 22 ) and the mesh electrode ( 24 ), thereby forming a separation zone ( 10 ) between the electrodes.