| 摘要 |
FIELD: optical devices for measuring optical phase difference by interferometry methods, measuring light polarization, and also controlling intensiveness, phase and polarization of radiation. ^ SUBSTANCE: microscope contains laser radiation source, on movement route of beam of which mounted serially are light-dividing element, scanning system with two mirror deflectors and objects, while on movement route of beam, reflected from sample being studied and light-division element, radiation receiver is positioned with signal processing system. Before light-division element, transformer of radiation polarization to circular polarization is mounted, while between light-division element and scanning system, beam-branching element is positioned, transforming input radiation beam to two beams with orthogonal polarization directions and spatial shift, while as receiver of radiation, meter of power of components of crossed radiation polarizations is used. ^ EFFECT: improved signal-noise ratio due to usage of differential contrast, increased sensitivity to weak drops of optical density of objects, increased linearity of measurement of height of profile of object being studied. ^ 9 cl, 1 dwg |
