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发明名称
EXPOSURE APPARATUS
摘要
申请公布号
KR20060104624(A)
申请公布日期
2006.10.09
申请号
KR20050026939
申请日期
2005.03.31
申请人
LG ELECTRONICS INC.
发明人
CHO, YONG JUN
分类号
H01L21/027
主分类号
H01L21/027
代理机构
代理人
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