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发明名称
METHOD FOR INSPECTING A PROFILE OF MINUTE STRUCTURES
摘要
申请公布号
KR20060103972(A)
申请公布日期
2006.10.09
申请号
KR20050025730
申请日期
2005.03.29
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
PEAK, JONG SUN
分类号
H01L21/66
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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