SUSCEPTOR OF EQUIPMENT FOR GAS PHASE THIN FILM GROWTH AND EQUIPMENT FOR GAS PHASE THIN FILM GROWTH USING THE SUSCEPTOR,申请号KR20060084219-传众专利搜索

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发明名称	SUSCEPTOR OF EQUIPMENT FOR GAS PHASE THIN FILM GROWTH AND EQUIPMENT FOR GAS PHASE THIN FILM GROWTH USING THE SUSCEPTOR
摘要
申请公布号	KR20060104960(A)	申请公布日期	2006.10.09
申请号	KR20060084219	申请日期	2006.09.01
申请人	TOSHIBA CERAMICS CO., LTD.;NUFLARE TECHNOLOGY INC.	发明人	TOBASHI SHYUJI;OHASHI TADASHI;IWATA KATSUYUKI;SAITO HIROYUKI;MITANI SHINICHI;HONDA TAKAAKI;ARAI HIDEKI;MUROFUSHI YOSHITAKA;SUZUKI KUNIHIKO;TAKAHASHI HIDENORI;ITO HIDEKI;KATUMATA HIROFUMI
分类号	H01L21/205;C23C16/44;C23C16/455;C23C16/458;C23C16/46;C23C16/52;C30B25/12;C30B25/16;C30B31/14;C30B31/18;H01L21/00	主分类号	H01L21/205
代理机构		代理人
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