发明名称 |
MEMS NANOINDENTER |
摘要 |
<p>A force sensor (200) and nanoidenation system (300) using such force sensor (200), wherein the force sensor (200) comprise a movable membrane (207) attached to a fixed bulk structure (210) with springs (201, 202, 203, 204) formed between the membrane (207) and bulk structure (210); the springs (201, 202, 203, 204) may be provided two on each side of a rectangular membrane(207) and each in the form of a U-shape with displacing elements (801) formed perpendicular to each open end of each U-shaped spring (800). The force sensor further comprises electrodes (206) for detecting capacitive changes between the movable membrane (207) and the electrodes (206) in order to measure a movement in relation to an applied force. The membrane (207) further comprises a probe holding structure (214) for providing a solution for interchangeable probes (211).</p> |
申请公布号 |
EP1706888(A2) |
申请公布日期 |
2006.10.04 |
申请号 |
EP20050704766 |
申请日期 |
2005.01.26 |
申请人 |
NANOFACTORY INSTRUMENTS AB |
发明人 |
ENOKSSON, PETER;NAFARI, ALEXANDRA;OLIN, HAKAN;ALTHOFF, FREDRIK;DANILOV, ANDREY;DAHLSTROEM, JENS |
分类号 |
H01J37/26;B81B3/00;G01L;G01L1/00;G01L1/14;G01L7/10 |
主分类号 |
H01J37/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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