发明名称 |
Probing apparatus and positional deviation acquiring method |
摘要 |
<p>In a prober, a post-contact image representing a region including a pad is acquired by capturing an image of a substrate after a probe has been brought into contact with the pad having an existing probe mark. An image storage unit stores in advance a pre-contact image representing the pad-inclusive region before the probe is brought into contact with the pad. A latest probe mark position acquiring unit acquires a position of a latest probe mark region created by the contact of the probe with the pad from among a plurality of probe mark regions in the post-contact image respectively corresponding to a plurality of probe marks on the pad by comparing the post-contact image with the pre-contact image. A positional deviation acquiring unit finds a deviation in a contact position of the probe with respect to the pad, based on the position of the latest probe mark region.</p> |
申请公布号 |
EP1707971(A1) |
申请公布日期 |
2006.10.04 |
申请号 |
EP20060006237 |
申请日期 |
2006.03.27 |
申请人 |
TOKYO ELECTRON LIMITED |
发明人 |
KURIHARA, DAIKI;CHAYA, HIROMI;HYAKUDOMI, TAKANORI |
分类号 |
G01R31/28 |
主分类号 |
G01R31/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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