THE EQUIPMENT OF MANUFACTURING SEMICONDUCTOR DEVICE,申请号KR20050025473-传众专利搜索

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发明名称	THE EQUIPMENT OF MANUFACTURING SEMICONDUCTOR DEVICE
摘要
申请公布号	KR20060103653(A)	申请公布日期	2006.10.04
申请号	KR20050025473	申请日期	2005.03.28
申请人	SAMSUNG ELECTRONICS CO., LTD.	发明人	KIM, JUNG NAM
分类号	H01L21/205;H01L21/324	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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