发明名称 |
Plasma generating electrode and plasma reactor |
摘要 |
A plasma generating electrode capable of generating plasma with a high energy level by using a small amount of electric power is provided. The plasma generating electrode includes at least a pair of unit electrodes including a unit electrode as an anode and a unit electrode as a cathode, and can generate plasma by applying voltage, the unit electrode as an anode and the unit electrode as a cathode being disposed facing each other, and at least the unit electrode as an anode having a plate-like ceramic dielectric and a conductive film disposed in the ceramic dielectric, wherein the unit electrode as a cathode can emit secondary electrons in a number five times or greater than the number of cations (primary particles) which it receives when the cations produced in the process of plasma generation collide therewith. |
申请公布号 |
EP1708242(A1) |
申请公布日期 |
2006.10.04 |
申请号 |
EP20060251617 |
申请日期 |
2006.03.24 |
申请人 |
NGK INSULATORS, LTD.;HONDA MOTOR CO., LTD. |
发明人 |
FUJIOKA, YASUMASA;KONDOU, ATSUO;SAKUMA, TAKESHI;MASUDA, MASAAKI;DOSAKA, KENJI;KONDO, KAZUHIRO |
分类号 |
H01J37/32;B01D53/32;B01D53/92 |
主分类号 |
H01J37/32 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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